Gyroscope and method for manufacturing the same

A gyroscope comprising:

• a substrate comprising plural bottom driving electrodes and plural bottom measuring electrodes around the bottom driving electrodes;
• a dielectric insulating layer provided on the substrate, comprising a closed cavity,
• a supporting hub received in the closed cavity and arranged on the substrate;
• a supporting ring arranged on the substrate and being able to rotate around the supporting hub;
• a ring-typed planar inertia being around and having the same central axis with the supporting ring, and comprising a first insulating layer and a weighting layer under the first insulating layer;
• plural suspending arms connecting the supporting ring to the ring-typed planar inertia, and supporting the ring-typed planar inertia suspending in the closed cavity;
• plural elastic components surrounded by the supporting ring, the ring-typed planar inertia and two adjacent suspending arms;
• plural top driving electrodes covering the supporting ring, the ring-typed planar inertia, the suspending arms and the elastic components;
• and
• plural conductive plugs connecting the top driving electrodes which are arranged on the elastic components to the bottom driving electrodes.