US 2013/0111637 A1Published application

Modification of atomic force microscopy tips by deposition of nanoparticles with an aggregate source

AssigneeConsejo Superior De Investicaciones CientíFicas (Csic)

InventorsElisa Leonor Roman Garcia, Lidia Martinez Orellana, Mercedes Diaz Lagos, Yves Huttel

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Abstract

The present invention relates to a method for covering Atomic Force Microscopy (AFM) tips by depositing a material in the form of nanoparticles with an aggregate source.

Claims8

Dependent claims

A method for coating at least one AFM tip by means of ion cluster source technique with the material for coating in the form of nanoparticles.

Dependencies are inferred from the claim text.

Facts

Application: 13/697,598Filed 4 May 2011
Priority: ES P20103071213 May 2010
Published: 2 May 2013
Term ends: Not estimatedThe source records don’t support an estimate.

Classification9 codes

G01Q 60/38
AFM [Atomic Force Microscopy] or apparatus therefor, e.g. AFM probes: probes, their manufacture, or their related instrumentation, e.g. holders
C23C 14/22
Coating by vacuum evaporation, by sputtering or by ion implantation of the coating forming material: characterised by the process of coating
G01Q 60/42
Probes, their manufacture, or their related instrumentation, e.g. holders: functionalisation
B82Y 15/00
Nanotechnology for interacting, sensing or actuating

Family

US 9,015,861 B2Related patent
US 2013/0111637 A1This patent

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