Method of inserting dummy patterns
AssigneeShanghai Hua Hong NEC Electronics Co., Ltd.
InventorFucheng Chen
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Abstract
A method of inserting dummy patterns is provided. The method includes: determining an applicable area in which dummy patterns shall be inserted and an inapplicable area in which dummy patterns shall not be inserted on a chip; and inserting dummy patterns starting from one side of the inapplicable area and arranging the inserted dummy patterns into circles. The method of the present invention ensures that dummy patters are preferentially inserted around the device that requires protection by dummy patterns, so that good uniformity of chip pattern densities is guaranteed and within-wafer uniformity is improved, thus improving the yield and performance of semiconductor devices.
Claims5
A method of inserting dummy patterns, comprising the following steps:
- determining an applicable area in which dummy patterns shall be inserted and an inapplicable area in which dummy patterns shall not be inserted on a chip;
- and
- inserting dummy patterns starting from one side of the inapplicable area and arranging the inserted dummy patterns into circles.
Dependencies are inferred from the claim text.