Non-contact magnetic drive assembly with mechanical stop elements
AssigneeFerrotec (USA) Corporation
InventorsCris Kroneberger, Bharatkumar Patel
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AssigneeFerrotec (USA) Corporation
InventorsCris Kroneberger, Bharatkumar Patel
Estimating the term…
A non-contact magnetic drive assembly with mechanical stop elements for a vacuum deposition system employing a lift-off process having a HULA configuration featuring a plurality of magnets coupled in an annular orientation to a central ring and an orbital ring, each magnet of the orbital ring becomes superposed with a magnet of the central ring as the orbital ring rotates, and a central drive component driving either the central ring, the orbital ring around the central ring or both simultaneously, the central drive component provides a rotational speed allowing non-contact, magnetic drive rotation of the orbital ring around the central ring until a difference between a magnetic drive torque of the superposed magnets and the rotational speed of the central drive component causes the superposed magnets to decouple enabling mechanical drive rotation by interactive contact between a plurality of central ring teeth and a plurality of orbital ring.
A non-contact, magnetic drive assembly for a vacuum deposition system employing a lift-off process, the drive assembly comprising:
A method of increasing throughput in a lift-off process vacuum deposition system while minimizing particulate contamination and incomplete batching of silicon wafers, the method comprising:
Dependencies are inferred from the claim text.