Coherence grid -- interferometer and method for a spatially resolved optic measurement of the surface geometry of an object

A coherence grid—interferometer for a spatially resolved optic measuring of data for elevation geometry of an object,

• comprising a light source (2), an interferometer, a path length—altering unit, and a camera (3) with a detection area, said detection area comprises a plurality of locally different photo sensors, with the interferometer being embodied cooperating with the light source (2) and the camera (3) such that an outgoing beam emitted by the light source (2) is split into a measuring beam and a reference beam (8), with the measuring beam (7) impinging the object (1) in a planar fashion and at least partially reflected and/or portions of the measuring beam scattered by the object (1) being returned to the detection area of the camera (3) back into a radiation path of the interferometer and overlapped with the reference beam (8) such that the overlapped measuring beam and reference beam (8) cover the plurality of photo sensors, and the optic path length—altering unit being embodied to change an optic path length of at least one of the measuring beam or the reference beam, the path length—altering unit comprises a path scale (11) and a path detector (12) arranged such that upon changing the optic path length of the at least one of the measuring beam or the reference beam by the path length—altering unit, a synchronous motion of the path detector occurs in reference to the path scale (11).