Substrate holder, lithographic apparatus, device manufacturing method, and method of manufacturing a substrate holder

A lithographic apparatus, comprising:

• a projection system arranged to project a beam patterned by a patterning device onto a substrate;
• and
• a substrate holder arranged to hold the substrate, the substrate holder comprising:
• a main body having a surface;
• a plurality of burls projecting from the surface and having end surfaces to support a substrate;
• a planarization layer provided on at least part of the main body surface, the planarization layer having an outer surface having a peak to valley distance of less than about 10 μm;
• and
• a thin film stack provided on the planarization layer and forming an electric component.

A device manufacturing method using a lithographic apparatus, the method comprising:

• projecting a beam patterned by a patterning device onto a substrate while holding the substrate in a substrate holder,
• wherein the substrate holder comprises:
• a main body having a surface;
• a plurality of burls projecting from the surface and having end surfaces to support a substrate;
• a planarization layer provided on at least part of the main body surface, the planarization layer having an outer surface having a peak to valley distance of less than about 10 μm;
• and a thin film stack provided on the planarization layer and forming an electric component.

A substrate holder for use in a lithographic apparatus, the substrate holder comprising:

• a main body having a surface;
• a plurality of burls projecting from the surface and having end surfaces to support a substrate;
• a planarization layer provided on at least part of the main body surface, the planarization layer having a substantially uniform thickness;
• and
• a thin film stack provided on the planarization layer and forming an electric component.

A method of manufacturing a substrate holder for use in a lithographic apparatus, the method comprising:

• providing a main body having a surface and a plurality of burls projecting from the surface and having end surfaces to support a substrate;
• forming a planarization layer on at least part of the main body surface;
• and
• forming a thin film stack on the planarization layer, the thin film stack forming an electric component and the planarization layer having an outer surface having a peak to valley distance of less than about 10 μm.