Target positioning device, method for driving a target positioning device, and a lithography system comprising such a target positioning device

Method for driving a target positioning device within a system, in particular within a lithography system, said target positioning device comprising

• a carrier for carrying a target,
• a stage for carrying and moving the carrier within said system, wherein said stage comprises a first X-stage base and a second X-stage base, both arranged on top of a common base plate, wherein said first X-stage base carries a first X-stage carriage, and wherein said second X-stage base carries a second X-stage carriage, and a Y-beam comprising a Y-stage for carrying said carrier and moving said carrier in a second direction (Y), wherein said Y-beam bridges the space between the X-stage carriages and is connected to the first X-stage carriage via a first flexible coupling and to the second X-stage carriage via a second flexible coupling,
• two motors, each for driving a corresponding X-stage carriage along its corresponding X-stage base along a first direction (X), and
• a controller for controlling the motors, wherein the controller is arranged for controlling each of the motors individually,
• wherein said method comprises a step of individually controlling the motors for at least substantially preventing a deviation in orientation of the Y-beam relative to said x-stage bases due to the flexible coupling.

Method for driving a target positioning device within a system, in particular within a lithography system, said target positioning device comprising

• a carrier for carrying a target,
• a stage for carrying and moving the carrier within said system, wherein said stage comprises a first X-stage base and a second X-stage base, both arranged on top of a common base plate, wherein said first X-stage base carries a first X-stage carriage, and wherein said second X-stage base carries a second X-stage carriage, and a Y-beam comprising a Y-stage for carrying said carrier and moving said carrier in a second direction (Y), wherein said Y-beam bridges the space between the X-stage carriages and is connected to the first X-stage carriage via a first flexible coupling and to the second X-stage carriage via a second flexible coupling,
• two motors, each for driving a corresponding X-stage carriage along its corresponding X-stage base along a first direction (X), and
• a controller for controlling the motors, wherein the controller is arranged to control a force which each of said motors applies to its corresponding x-stage carriage individually.