Mems micro-mirror device
AssigneeLemoptix SA
InventorsNicolas Abelè, Faouzi Khechana, Lucio Kilcher
Life of this patent
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Abstract
A MEMS micro-minor device includes, a single package; a first mirror and second minor, wherein at least one of the minors is configured to oscillate along an oscillation axis; wherein both mirrors are located within the single package and are arranged such that as the at least one mirror oscillates, the light incident on the first micro-minor can be deflected to the second minor.
Claims14
A MEMS micro-mirror device comprising,
- a single package;
- a first mirror and second minor, wherein at least one of the minors is configured to oscillate along an oscillation axis;
- wherein both mirrors are located within the single package and are arranged such that as the at least one mirror oscillates, the light incident on the first micro-mirror can be deflected to the second minor;
- wherein the single package comprises one or more portions which are transparent to light, and wherein the one or more portions which are transparent to light are arranged to allow light to enter the single package from a rear end of the single package.
A method of projecting a image onto a projection screen using a MEMS micro-mirror device which comprises a front end, which has at least a portion, which is transparent to light, and a rear end, which is an end opposite the front end, which has at least a portion, which is transparent to light, the method comprising the steps of:
- receiving light from a laser source through the rear end of the MEMS micro-minor device;
- deflecting light within the MEMS micro-mirror device;
- and
- projecting the deflected light through the front end of the MEMS micro-mirror device onto a projection screen.
A method of manufacturing a MEMS micro-minor device comprising the steps of:
- arranging a first mirror and second minor within a single package, such that at least one of the minors is configured to oscillate along an oscillation axis and such that as the at least one mirror oscillates along the oscillation axis, the light incident on the first minor can be deflected to the second mirror;
- and
- providing one or more transparent windows in the single package which enable light to enter the single package through a rear end of the single package.
Dependencies are inferred from the claim text.