Method and apparatus for de-embedding

An apparatus, comprising:

• a test structure including a device-under-test (DUT) embedded in the test structure;
• and
• a plurality of dummy test structures including an open dummy structure, a distributed open dummy structure, and a short dummy structure,
• wherein the distributed open dummy structure includes a first signal transmission line coupled to a left signal test pad and a second signal transmission line coupled to a right signal test pad, the first and second signal transmission lines having a smaller total length than a total length of signal transmission lines of the open dummy structure, and
• wherein intrinsic transmission characteristics of the DUT can be derived from transmission parameters of the dummy test structures and the test structure.

A method of de-embedding, comprising:

• forming a test structure including a device-under-test (DUT) coupled to a left signal pad by a first transmission line and a right signal pad by a second transmission line;
• forming a plurality of dummy test structures including an open dummy structure, a distributed open dummy structure, and a short dummy structure,
• wherein the open dummy structure includes a third signal transmission line coupled to a left signal test pad and a fourth signal transmission line coupled to a right signal test pad,
• wherein the distributed open dummy structure includes a fifth signal transmission line coupled to a left signal test pad and a sixth signal transmission line coupled to a right signal test pad, the fifth and sixth signal transmission lines having a smaller total length than a total length of the third and fourth signal transmission lines of the open dummy structure;
• measuring transmission parameters of the test structure and the plurality of dummy test structures;
• and
• determining intrinsic transmission characteristics of the DUT using the transmission parameters of the test structure and the plurality of dummy test structures.