Support body for contact terminals and probe card
AssigneeTokyo Electron Limited
InventorsJun MOCHIZUKI, Kunihiro Furuya
Life of this patent
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Abstract
A support body for a plurality of contact terminals included in a probe card for inspecting semiconductor devices formed in a semiconductor substrate is provided. The support body includes a main body formed by stacking a plurality of plate-shaped members, a plurality of contact terminal holes formed through the main body in a thickness direction of the plate-shaped members, and one or more coolant paths provided in the main body. Further, the contact terminals respectively are inserted into the contact terminal holes.
Claims14
A support body for a plurality of contact terminals included in a probe card for inspecting semiconductor devices formed in a semiconductor substrate, the support body comprising:
- a main body formed by stacking a plurality of plate-shaped members;
- a plurality of contact terminal holes formed through the main body in a thickness direction of the plate-shaped members;
- and
- one or more coolant paths provided in the main body, wherein the contact terminals respectively are inserted into the contact terminal holes.
A support body for a plurality of contact terminals included in a probe card for inspecting semiconductor devices formed in a semiconductor substrate, the support body comprising:
- a pair of plate-shaped members facing each other;
- a thermal conductor filled between the pair of plate-shaped members;
- and
- a plurality of contact terminal holes formed by arranging openings, which are provided in each of the pair of plate-shaped members and formed through the plate-shaped members in a thickness direction of the plate-shaped members, to correspondingly align with one another in the thickness direction,
- wherein the contact terminals are inserted into the contact terminal holes to be in contact with the thermal conductor.
Dependencies are inferred from the claim text.