Method and apparatus for diagnosing status of parts in real time in plasma processing equipment
AssigneeLam Research Corporation
InventorRoger Patrick
Life of this patent
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Abstract
Apparatus and methods for diagnosing status of a consumable part of a plasma reaction chamber, the consumable part including at least one conductive element embedded therein. The method includes the steps of: coupling the conductive element to a power supply so that a bias potential relative to the ground is applied to the conductive element; exposing the consumable part to plasma erosion until the conductive element draws a current from the plasma upon exposure of the conductive element to the plasma; measuring the current; and evaluating a degree of erosion of the consumable part due to the plasma based on the measured current.
Claims20
A method of diagnosing status of a consumable part of a plasma reaction chamber, the consumable part including at least one conductive element embedded therein, comprising:
- coupling the conductive element to a power supply so that a bias potential relative to the ground is applied to the conductive element;
- exposing the consumable part to plasma erosion until the conductive element draws a current from the plasma upon exposure of the conductive element to the plasma;
- measuring the current;
- and
- evaluating a degree of erosion of the consumable part due to the plasma based on the measured current.
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Dependencies are inferred from the claim text.