Size-controllable opening and method of making same
AssigneeSTMicroelectronics S.r.l.
InventorJohn H. ZHANG
Life of this patent
Estimating the term…
Abstract
A support structure includes an internal cavity. An elastic membrane extends to divide the internal cavity into a first chamber and a second chamber. The elastic membrane includes a nanometric-sized pin hole extending there through to interconnect the first chamber to the second chamber. The elastic membrane is formed of a first electrode film and a second electrode film separated by a piezo insulating film. Electrical connection leads are provided to support application of a bias current to the first and second electrode films of the elastic membrane. In response to an applied bias current, the elastic membrane deforms by bending in a direction towards one of the first and second chambers so as to produce an increase in a diameter of the pin hole.
Claims29
Apparatus, comprising:
- a support structure including an internal cavity within the support structure;
- and
- an elastic membrane extending to divide the internal cavity into a first chamber and a second chamber, the elastic membrane including a pin hole extending there through to interconnect the first chamber to the second chamber;
- wherein the elastic membrane includes a first electrode film and a second electrode film separated by an insulating film, said elastic membrane configured to respond to an application of bias current to the first and second electrode films by bending to increase a diameter of the pin hole.
A method, comprising:
- forming an opening in a first substrate;
- filling the opening in the first substrate with a first etchable material;
- forming an elastic membrane including a first electrode film and a second electrode film separated by an insulating film to extend over the filled opening in the first substrate;
- forming a second substrate over the elastic membrane;
- forming an opening in the second substrate;
- filling the opening in the second substrate with a second etchable material;
- etching the second etchable material to expose a top surface of the elastic membrane;
- punching a pin hole through the elastic membrane;
- and
- removing the first and second etchable materials to define first and second chambers on either side of the elastic membrane.
Apparatus, comprising:
- an elastic membrane extending to divide an internal cavity into a first chamber and a second chamber, the elastic membrane including a first electrode film and a second electrode film separated by an insulating piezo film and further including a pin hole extending through the elastic membrane to interconnect the first chamber to the second chamber;
- and
- electrical connection leads configured to apply a received bias current to the first and second electrode films, said elastic membrane configured to respond to the applied bias current by bending towards one of the first and second chambers so as to increase the diameter of the pin hole.
Dependencies are inferred from the claim text.