Thermally oxidized seed layers for the production of textured electrodes and pzt devices and method of making

An electrical device comprising:

• a substrate;
• a textured layer formed above the substrate;
• the textured layer comprising metal-oxide having a rocksalt structure with a {100}-texture that provides a heteroepitaxial template;
• a platinum film layer having {100}-texture crystal orientation formed on the textured layer;
• the platinum film layer crystallographic texture acting as a template;
• and
• at least one ferroelectric material layer exhibiting spontaneous polarization stylo-epitaxially deposited on the platinum film layer;
• whereby the rocksalt structure of the textured layer facilitates the growth of the platinum film layer with a {100} orientation which forms a template for stylo-epitaxial deposition of the ferroelectric layer such that the at least one ferroelectric layer is formed with an {001} orientation that increases the magnitude of the spontaneous polarization of the at least one ferroelectric layer.

An electrical device comprising:

• a substrate;
• a textured layer formed on the substrate;
• the textured layer comprising metal oxide having a rocksalt structure that provides a heteroepitaxial template;
• a first electrode film layer having a crystallographic texture acting as a template formed on the textured layer;
• at least one ferroelectric material layer exhibiting spontaneous polarization epitaxially deposited on the first electrode film layer;
• whereby the rocksalt structure of the textured layer facilitates the growth of the first electrode film layer with a {100} orientation which forms a template for the epitaxial deposition of the ferroelectric layer such that the at least one ferroelectric layer is formed with an {001} orientation that increases the magnitude of the spontaneous polarization of the at least one ferroelectric layer.