Semiconductor device

A semiconductor device comprising:

• a transistor formed in a transistor region on a substrate;
• a multilayer interconnect structure formed over the transistor region;
• a first conductor pattern formed in the multilayer interconnect structure to overlap the transistor region, said first conductor pattern being coupled to ground or to a power supply;
• a first dielectric layer formed over the multilayer interconnect structure;
• a signal line formed over the first dielectric layer in a region in which it overlaps the first conductor pattern in plan view, the signal line being part of a transmission line;
• and
• two second conductor patterns formed in the same conductor layer as the signal line and, in a plan view, extending parallel to the signal line with the signal line between them,
• wherein the second conductor patterns are electrically coupled to the first conductor pattern,
• wherein a distance from the signal line to the second conductor patterns is greater than a height form the first conductor pattern to the signal line.