Integrated Circuitry, Methods Of Forming Capacitors, And Methods Of Forming Integrated Circuitry Comprising An Array Of Capacitors And Circuitry Peripheral To The Array

A method of forming integrated circuitry comprising an array of capacitors and circuitry peripheral to the array, comprising:

• providing a support material over a substrate within a capacitor array area and within peripheral circuitry area, the support material being at least one of conductive or semiconductive;
• forming capacitor openings into the support material within the capacitor array area, the capacitor openings comprising at least one of semiconductive or conductive sidewalls;
• depositing an insulator along the semiconductive and/or conductive capacitor opening sidewalls;
• forming a pair of capacitor electrodes having capacitor dielectric there-between within the respective capacitor openings laterally inward of the deposited insulator in the capacitor openings, one of the pair of capacitor electrodes within the respective capacitor openings being laterally adjacent the deposited insulator in the capacitor openings;
• forming contact openings into the support material within the peripheral circuitry area, the contact openings comprising at least one of semiconductive or conductive sidewalls;
• depositing an insulator along the semiconductive and/or conductive contact opening sidewalls;
• and
• forming a conductive contact within the respective contact openings laterally inward of the deposited insulator in the contact openings.

A method of forming integrated circuitry comprising an array of capacitors and circuitry peripheral to the array, comprising:

• providing a support material over a substrate within a capacitor array area and within peripheral circuitry area, the support material being at least one of semiconductive or conductive;
• forming capacitor openings into the support material within the capacitor array area, the capacitor openings comprising at least one of semiconductive or conductive sidewalls;
• depositing an insulator along the semiconductive and/or conductive capacitor opening sidewalls;
• forming a pair of capacitor electrodes having capacitor dielectric there-between within the respective capacitor openings laterally inward of the deposited insulator, one of the pair of capacitor electrodes within the respective capacitor openings being laterally adjacent the deposited insulator in the capacitor openings;
• forming antifuse openings into the support material within the peripheral circuitry area, the antifuse openings comprising at least one of semiconductive or conductive sidewalls;
• depositing an insulator along the semiconductive and/or conductive antifuse opening sidewalls;
• and
• forming a pair of antifuse electrodes having insulative material there-between within the respective antifuse openings laterally inward of the deposited insulator in the antifuse openings, one of the pair of antifuse electrodes within the respective antifuse openings being laterally adjacent the deposited insulator in the antifuse openings.

Integrated circuitry including a plurality of electronic devices which individually comprise a pair of conductive electrodes having dielectric there-between, comprising:

• a substrate comprising support material there-over, the support material being at least one of semiconductive or conductive;
• electronic device openings extending into the support material, the electronic device openings comprising at least one of semiconductive or conductive sidewalls;
• an insulator along the semiconductive and/or conductive electronic device opening sidewalls;
• and
• individual electronic devices within individual of the electronic device openings laterally inward of the insulator that is along the semiconductive and/or conductive electronic device opening sidewalls, the electronic devices individually comprising a pair of conductive electrodes having dielectric there-between, one of the pair of conductive electrodes within the respective electronic device openings being laterally adjacent the deposited insulator.