Wafer carrier
AssigneeEpistar Corporation
InventorsChung-Ying Chang, Yun-Ming Lo, Chi Shen, Ying-Chan Tseng
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Abstract
A wafer carrier comprises a supporting body having a height and comprising an opening, wherein a bottom surface of the opening is a curved surface; and a plurality of supporting rods formed around a periphery of the supporting body. Another aspect of the present application provides a manufacturing method of the wafer carrier. The method comprises forming an epitaxial layer on a growth substrate to form a wafer structure; measuring a curvature radius of the wafer structure; and providing the wafer carrier described above in accordance with the curvature radius of the wafer structure.
Claims14
A wafer carrier, comprising:
- a supporting body having a height and comprising an opening, wherein a bottom surface of the opening is a curved surface;
- and
- a plurality of supporting rods formed around a periphery of the supporting body.
Dependencies are inferred from the claim text.