Supply system and supply method for functional solution

Abstract

Provided are an electrolyzing unit (electrolyzing device 1) that electrolyzes a sulfuric acid solution having a sulfuric acid concentration of 75 to 96% by weight to generate peroxosulfuric acid, a gas-liquid separation unit (gas-liquid separation tank 10) that subjects the sulfuric acid solution thus electrolyzed to gas-liquid separation, a circulation line 11 that causes a portion of the sulfuric acid solution subjected to gas-liquid separation in the gas-liquid separation unit to circulate between it and the electrolyzing unit, a supply line 20 that supplies a portion of the sulfuric acid solution subjected to gas-liquid separation in the gas-liquid separation unit to an application side (single-wafer cleaning device 100), and a heating unit 22 that is provided in the supply line 20 and heats the sulfuric acid solution to 120 to 190° C., in which a transit time after the sulfuric acid solution is introduced to an inlet of the heating unit until being used in the application side is set so as to be less than 1 minute.

Dependencies are inferred from the claim text.