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US 2013/0092525 A1Published application
Concentric flow-through plasma reactor and methods therefor
AssigneeInnovalight, Inc.
InventorsXuegeng Li, Maxim Kelman, Mason Terry, Elena Rogojina, Eric Schiff, Karel Vanheusden
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Abstract
The present invention provides a radiofrequency plasma apparatus for the production of nanoparticles and method for producing nanoparticles using the apparatus. The apparatus is designed to provide high throughput and makes the continuous production of bulk quantities of high-quality crystalline nanoparticles possible. The electrode assembly of the plasma apparatus includes an outer electrode and a central electrode arranged in a concentric relationship to define an annular flow channel between the electrodes.
Claims15
A method for producing nanoparticles, comprising
- a) introducing a nanoparticles precursor gas into an annular channel of a plasma apparatus;
- b) igniting a plasma in the annular channel and thereby dissociating the nanoparticles precursor gas and forming nanoparticles.
Dependencies are inferred from the claim text.