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US 2013/0092415 A1Published application
Cable, method of manufacturing the same, and apparatus for depositing dielectric layer
AssigneeElectronics and Telecommunications Research Institute
InventorsYong Suk YANG, In-Kyu YOU, Jae Bon KOO, Soon-Won JUNG
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Abstract
The inventive concept provides cables, methods of manufacturing the same, and apparatuses for depositing a dielectric layer. The cable may include a first electrode, a second electrode spaced apart from the first electrode, and a dielectric layer disposed between the first and second electrodes and including a polymer having xylene as a monomer.
Claims14
A cable comprising:
- a first electrode;
- a second electrode spaced apart from the first electrode;
- and
- a dielectric layer disposed between the first and second electrodes, the dielectric layer including a polymer having xylene as a monomer.
1 more element
A method of manufacturing a cable, comprising:
- preparing a first electrode;
- decomposing xylene dimer into xylene monomers to provide the xylene monomers on a surface of the first electrode;
- forming the xylene monomers into a polymer on the surface of the first electrode, thereby forming a dielectric layer including the polymer;
- and
- forming a second electrode on a surface of the dielectric layer.
2 more elements
An apparatus for depositing a dielectric layer, comprising:
- a heating block including a reactant injection hole into which a reacting fluid is provided, an insertion hole connected to the reactant injection hole, and a heating tool, wherein an object is disposed in the insertion hole;
- and
- a cooling block disposed to be adjacent to the heating block and including a cooling tool,
- wherein the insertion hole extends into the cooling block;
- and
- wherein a deposition space is defined in a region where the reactant injection hole meets the insertion hole.
3 more elements
Dependencies are inferred from the claim text.