Multilayer adhesive sheet and method for manufacturing electronic component

A multilayer adhesive sheet comprising a base film, an adhesive layer that is disposed on one surface of the base film, and a die attach film that is disposed on the exposed surface of the adhesive layer, the adhesive that constitutes the adhesive layer containing (A) a (meth)acrylic ester copolymer, (B) an ultraviolet polymerizable compound, (C) a multifunctional isocyanate curing agent, (D) a photopolymerization initiator, and (E) a silicone polymer, wherein:

• the (meth)acrylic ester copolymer (A) is a copolymer of (meth)acrylic ester monomers or a copolymer of (meth)acrylic ester monomers and vinyl compound monomers, the (meth)acrylic ester monomers and the vinyl compound monomers having no hydroxyl group;
• the ultraviolet polymerizable compound (B) comprises a urethane acrylate oligomer (B1) and a multifunctional (meth)acrylate (B2), the urethane acrylate oligomer (B1) containing 10 or more vinyl groups and having a weight-average molecular weight Mw of 50000 or more and a polydispersity Mw/Mn, a ratio of the weight-average molecular weight Mw to the number-average molecular weight Mn, of 5 or more;
• the photopolymerization initiator (D) has a hydroxyl group;
• the silicone polymer (E) has a hydroxyl group;
• and
• the adhesive that constitutes the adhesive layer contains 100 parts by mass of the (meth)acrylic ester copolymer (A), 5 to 200 parts by mass of the ultraviolet polymerizable compound (B), 0.5 to 20 parts by mass of the multifunctional isocyanate curing agent (C), 0.1 to 20 parts by mass of the photopolymerization initiator (D), and 0.1 to 20 parts by mass of the silicone polymer (E).