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US 2013/0081542 A1Published application
System for preventing contaminants from reaching a gas purifier
AssigneePraxair Technology, Inc.
InventorsTHOMAS ROBERT SCHULTE, Michael Henry Hawke, Keith Randall Pace, Thomas John Bergman, Brian Donald Warrick, Sandro DiSanto, Rick Boyer
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Abstract
The present invention is directed to the prevention of an exothermic reaction in the gas purifier of an ultra-high purity gas system.
Claims8
A contaminant gas detection apparatus for protecting a downstream gas purifier from damage, comprising:
- a gas analyzer configured to detect a contaminant concentration in a conventional purity gas stream, the gas analyzer comprising a detection response time for detecting the contaminant concentration;
- and
- a buffer vessel downstream and in fluid communication with the gas analyzer, the buffer vessel comprising a buffer volume sufficient to hold up a predetermined volume of a conventional purity gas stream prior to routing the conventional purity gas stream to the gas purifier, the buffer vessel configured for holding up the predetermined volume of the conventional purity gas stream for at least a time equal to the detection response time of the analyzer.
Dependencies are inferred from the claim text.