Vibrating tilting plates with improved dynamic flatness and shock resistance

Abstract

Devices with tilting plates, in particular tilting mirror plates, having improved dynamic flatness and shock resistance and methods for forming and operating such devices. A mirror device includes a minor plate operative to perform a tilt motion around a mirror tilt axis and an elastic foundation which provides distributed support to the minor plate. In an embodiment, the minor plate and the elastic foundation are formed in a single silicon-on-insulator (SOI) wafer. In another embodiment, the minor plate and the elastic foundation are formed in separate SOI wafers. The elastic foundation may include spiral or serpentine or any other appropriate shaped springs distributed uniformly or non-uniformly between the minor plate and a base.

Dependencies are inferred from the claim text.