Substrate surface defect inspection method and inspection device

A substrate surface defect inspection device comprising:

• a turnable stage means on which a substrate that is an inspection target is carried;
• an inspection optical system including one or more illumination sources irradiating light onto the substrate carried on the stage means, and one or more detectors detecting reflected and scattered light from the substrate onto which the light is irradiated by the illumination sources;
• an A/D converter means amplifying and A/D converting signals outputted from the one or more detectors of the inspection optical system;
• a defect detection means processing the signals, which are outputted from the one or more detectors and converted by the A/D converter, and detecting a defect on the substrate;
• and
• a defect classification means classifying the defect on the basis of the signals outputted from the one or more detectors;
• wherein the defect classification means is adapted to correct a classification parameter utilizing a detection signal for a specific defect sample adjacent to a classification boundary, after determining the classification parameter using an initial defect sample.

A substrate surface defect inspection device comprising:

• a turnable stage means on which a substrate that is an inspection target is carried;
• an inspection optical system including one or more illumination sources irradiating light onto the substrate carried on the stage means, and one or more detectors detecting reflected and scattered light from the substrate onto which the light is irradiated by the illumination sources;
• an AID converter means amplifying and AID converting signals outputted from the one or more detectors of the inspection optical system;
• a defect detection means processing the signals, which are outputted from the one or more detectors and converted by the A/D converter, and detecting a defect on the substrate;
• and
• a defect classification means classifying the defect on the basis of the signals outputted from the one or more detectors;
• wherein the defect classification means is adapted to present a defect size and a classification limitation on a classification type by simulation and correct a classification parameter for an actual sample.

A substrate surface defect inspection method comprising the steps of:

• irradiating illumination light from one or more illumination sources onto a substrate carried on a turnable stage, while turning the turnable state;
• detecting, by one or more detectors, reflected and scattered light from the substrate onto which the light is irradiated by the one or more illumination sources;
• amplifying and A/D converting signals that are outputted from the one or more detectors that detect the reflected and scattered light from the substrate;
• processing the signals, that are outputted from the one or more detectors and A/D converted, and detecting a defect on the substrate;
• and
• classifying the detected defect;
• wherein the step of classifying a defect includes the step of correcting a classification parameter utilizing a detection signal for an actual sample, after determining the classification parameter by simulation.

A substrate surface defect inspection method comprising the steps of:

• irradiating illumination light from one or more illumination sources onto a substrate carried on a turnable stage, while turning the turnable state;
• detecting, by one or more detectors, reflected and scattered light from the substrate onto which the light is irradiated by the one or more illumination sources;
• amplifying and A/D converting signals that are outputted from the one or more detectors that detect the reflected and scattered light from the substrate;
• processing the signals, that are outputted from the one or more detectors and A/D converted, and detecting a defect on the substrate;
• and
• classifying the detected defect;
• wherein the step of classifying a defect includes the step of correcting a classification parameter utilizing a detection signal for a specific defect sample adjacent to a classification boundary, after determining the classification parameter using an initial defect sample.

A substrate surface defect inspection method comprising the steps of:

• irradiating illumination light from one or more illumination sources onto a substrate carried on a turnable stage, while turning the turnable state;
• detecting, by one or more detectors, reflected and scattered light from the substrate onto which the light is irradiated by the one or more illumination sources;
• amplifying and A/D converting signals that are outputted from the one or more detectors that detect the reflected and scattered light from the substrate;
• processing the signals, that are outputted from the one or more detectors and A/D converted, and detecting a defect on the substrate;
• and
• classifying the detected defect;
• wherein the step of classifying a defect includes the step of presenting a defect size and a classification limitation on a classification type by simulation and correcting a classification parameter for an actual sample.