Object characteristic measuring system
AssigneeIndustrial Technology Research Institute
InventorTze-An LIU
Life of this patent
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Abstract
An object characteristic measuring system, used to measure semiconductor thin film characteristics, is formed by a dual-optical comb absolute distance measuring device and a terahertz (THz) wave time-domain measuring device. The dual-optical comb absolute distance measuring device is formed by two laser modules, for determining a first characteristic of an object to be measured through laser pulses emitted by the two laser modules. The THz wave time-domain measuring device is used to emit a THz wave, so as to measure a second characteristic of the object to be measured.
Claims18
An object characteristic measuring system, comprising:
- a dual-optical comb absolute distance measuring system, for generating a first laser pulse series and a second laser pulse series, wherein the second laser pulse series is used to irradiate a reference plane and an object to be measured, so as to sample the reflected second laser pulse series according to the first laser pulse series, thereby accordingly determining a first characteristic of the object to be measured;
- and
- a terahertz (THz) wave time-domain measuring system, for emitting a THz wave in response to the second laser pulse series, wherein the THz wave is capable of being emitted to the object to be measured and is reflected, so as to sample the reflected THz wave according to the first laser pulse series, thereby determining a second characteristic of the object to be measured.
An object characteristic measuring method, comprising:
- generating a first laser pulse series and a second laser pulse series, wherein the second laser pulse series is used to irradiate a reference plane and an object to be measured, so as to sample the reflected second laser pulse series according to the first laser pulse series, thereby accordingly determining a first characteristic of the object to be measured;
- and
- emitting a terahertz (THz) wave in response to the second laser pulse series, wherein the THz wave is capable of being emitted to the object to be measured and is reflected, so as to sample the reflected THz wave according to the first laser pulse series, thereby determining a second characteristic of the object to be measured.
Dependencies are inferred from the claim text.