Radiation Source
AssigneeASML Netherlands B.V.
InventorsHendrikus Gijsbertus SCHIMMEL, Johan Frederik Dijksman, Dzmitry Labetski
Life of this patent
Estimating the term…
Abstract
A radiation source comprises a reservoir, a nozzle, a laser, and a positive lens. The reservoir is configured to retain a volume of fuel. The nozzle, in fluid connection with the reservoir, is configured to direct a stream of fuel along a trajectory towards a plasma formation location. The laser configured to direct laser radiation at the stream at the plasma formation location to generate, in use, a radiation generating plasma. The positive lens arrangement configured to focus an at least potential spread of trajectories of the stream of fuel toward the plasma formation location, the lens comprising an electric field generating element and/or a magnetic field generating element.
Claims15
A radiation source comprising:
- a reservoir configured to retain a volume of fuel;
- a nozzle, in fluid connection with the reservoir, and configured to direct a stream of fuel along a trajectory towards a plasma formation location;
- a laser configured to direct laser radiation at the stream at the plasma formation location to generate a radiation generating plasma;
- and
- a positive lens arrangement configured to focus an at least potential spread of trajectories of the stream of fuel toward the plasma formation location, the lens comprising an electric field generating element and/or a magnetic field generating element.
A fluid stream generator comprising:
- a reservoir configured to retain a volume of fluid;
- a nozzle, in fluid connection with the reservoir, and configured to direct a stream of fluid along a trajectory towards a target location;
- and
- a positive lens arrangement configured to focus an at least potential spread of trajectories of the stream of fluid toward the target location, the lens comprising an electric field generating element and/or a magnetic field generating element.
A lithographic apparatus comprising:
- an illumination system configured to provide a radiation beam;
- a patterning device configured to impart the radiation beam with a pattern in its cross-section;
- a substrate holder configured to hold a substrate;
- a projection system configured to project the patterned radiation beam onto a target portion of the substrate, and
- wherein the lithographic apparatus further comprises, or is in connection with, a radiation source comprising:
- a reservoir configured to retain a volume of fuel;
- a nozzle, in fluid connection with the reservoir, and configured to direct a stream of fuel along a trajectory towards a plasma formation location;
- a laser configured to direct laser radiation at the stream at the plasma formation location to generate a radiation generating plasma;
- and
- a positive lens arrangement configured to focus an at least potential spread of trajectories of the stream of fuel toward the plasma formation location, the lens comprising an electric field generating element and/or a magnetic field generating element.
A method of converging a potential spread of trajectories of an electrically charged stream of fuel of a fuel stream generator, the method comprising:
- establishing a positive lens using an electric field or a magnetic field;
- and
- passing the charged stream of fuel through the positive lens.
Dependencies are inferred from the claim text.