Radiation Source

A lithographic apparatus, comprising:

• a radiation source comprising:
• a reservoir configured to retain a volume of fuel;
• a nozzle, in fluid connection with the reservoir, and configured to direct a stream of fuel along a trajectory towards a plasma formation location;
• a laser configured to direct laser radiation at the stream at the plasma formation location to generate, in use, a radiation generating plasma;
• and
• a fuel contamination control arrangement, the contamination control arrangement comprising:
• a magnetic field generation element configured to generate a magnetic field;
• an electric field generation element configured to generate an electric field;
• wherein the magnetic field generation element and the electric field generation element together being configured to ensure that, in use, the magnetic field and the electric field overlap at a location, or a potential location, of contamination within the fuel, and to ensure that lines of flux of the magnetic field and electric field are non-parallel at that location, in order to control movement of the contamination;
• an illumination system configured to provide a radiation beam from the radiation source;
• a patterning device configured to impart the radiation beam with a pattern in its cross-section;
• a substrate holder configured to hold a substrate;
• and
• a projection system configured to project the patterned radiation beam onto a target portion of the substrate.

A fluid stream generator, comprising:

• a reservoir configured to retain a volume of fluid;
• a nozzle, in fluid connection with the reservoir, and configured to direct a stream of fluid along a trajectory;
• and
• a fluid contamination control arrangement, the contamination control arrangement comprising:
• a magnetic field generation element configured to generate a magnetic field;
• and
• an electric field generation element configured to generate an electric field, and
• wherein the magnetic field generation element and the electric field generation element together being configured to ensure that, in use, the magnetic field and the electric field overlap at a location, or a potential location, of contamination within the fluid, and to ensure that lines of flux of the magnetic field and electric field are non-parallel at that location, in order to control movement of the contamination.

A radiation source comprising:

• a reservoir configured to retain a volume of fuel;
• a nozzle, in fluid connection with the reservoir, and configured to direct a stream of fuel along a trajectory towards a plasma formation location;
• a laser configured to direct laser radiation at the stream at the plasma formation location to generate, in use, a radiation generating plasma;
• and
• a fuel contamination control arrangement, the contamination control arrangement comprising:
• a magnetic field generation element configured to generate a magnetic field;
• and
• an electric field generation element configured to generate an electric field, and
• wherein the magnetic field generation element and/or the electric field generation element being configured to ensure that the generated magnetic field and/or electric field is present at a location, or a potential location, of contamination within the fluid to control movement of the contamination.

A fluid stream generator, comprising:

• a reservoir configured to retain a volume of fuel;
• a nozzle, in fluid connection with the reservoir, and configured to direct a stream of fuel along a trajectory;
• and
• a fuel contamination control arrangement, the contamination control arrangement comprising:
• a magnetic field generation element configured to generate a magnetic field;
• and
• an electric field generation element configured to generate an electric field;
• and
• wherein the magnetic field generation element and/or the electric field generation element being configured to ensure that the generated magnetic field and/or electric field is present at a location, or a potential location, of contamination within the fluid to control movement of the contamination.