Common mode filter with multi spiral layer structure and method of manufacturing the same
AssigneeInpaq Technology Co., Ltd.
InventorsYU CHIA CHANG, CHI LONG LIN, CHENG YI WANG, SHIN MIN TAI
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Abstract
A common mode filter with a multi spiral layer structure includes a first coil, a second coil, a third coil connected in series with the first coil, a fourth coil connected in series with the second coil, a first material layer and a second material layer. The second coil is disposed between the first and third coils, and the third coil is disposed between the second and fourth coils. At least one of the first and second material layers comprises magnetic material. The first, second, third, and fourth coils are disposed between the first and second material layers.
Claims21
A common mode filter with a multi spiral layer structure, comprising:
- a first coil;
- a second coil;
- a third coil connected in series with the first coil, wherein the second coil is disposed between the first coil and the third coil;
- a fourth coil connected in series with the second coil, wherein the third coil is disposed between the second coil and the fourth coil;
- and
- a first material layer and a second material layer, at least one of the first and second material layers comprising magnetic material, wherein the first, second, third, and fourth coils are disposed between the first and second material layers.
The common mode filter of claim 7, wherein outer end portions of the first, second, third, and fourth coils are adjacent to a periphery of the common mode filter.
A method of manufacturing a common mode filter with a multi spiral layer structure, comprising the steps of:
- forming a magnetic material layer on an insulating substrate to obtain a heterogeneous substrate;
- forming a first coil comprising an inner end portion and an outer end portion on the heterogeneous substrate;
- forming a first insulating layer covering the first coil;
- forming a second coil on the first insulating layer;
- forming a second insulating layer covering the second coil;
- forming a first contact hole exposing either of the inner and outer end portions of the first coil;
- filling a first metal material in the first contact hole to form a first conductive pillar;
- forming a third coil comprising an inner end portion and an outer end portion on the second insulating layer, wherein either of the inner and outer end portions of the third coil is connected with the first conductive pillar;
- forming a third insulating layer covering the third coil;
- forming a second contact hole exposing either of the inner and outer end portions of the second coil;
- filling a second metal material in the second contact hole to form a second conductive pillar;
- forming a fourth coil comprising an inner end portion and an outer end portion on the third insulating layer, wherein either of the inner and outer end portions of the fourth coil is connected with the second conductive pillar;
- forming a fourth insulating layer covering the fourth coil;
- and
- disposing a material layer on the fourth insulating layer.
Dependencies are inferred from the claim text.