Capacitance measurement circuit and method therefor

A capacitance measurement method for measuring a capacitance of a sensor capacitor, the method comprising:

• coupling a first charge quantity to a first input terminal of a comparator through a reference capacitor to form a first input voltage at the first input terminal of the comparator;
• coupling a second charge quantity to a second input terminal of the comparator through the sensor capacitor to form a second input voltage at the second input terminal of the comparator;
• differentially comparing the first input voltage with the second input voltage to generate a comparison result;
• and
• successively approximating an analog voltage according to the comparison result, wherein the analog voltage couples a third charge quantity to the first input terminal or to the second input terminal of the comparator through a coupling capacitor, such that the first input voltage approximates the second input voltage, wherein a successive approximation result reflects the capacitance of the sensor capacitor.