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US 2013/0076274 A1Published application
Electrostatic actuator control
AssigneeDigitalOptics Corporation MEMS
InventorRoman C. Gutierrez
Life of this patent
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Abstract
In one embodiment, a device is provided that includes: a cascaded electrostatic actuator defining a stack in a substrate having a plurality of gaps between parallel plate electrodes; and a controller configured to drive the cascaded electrostatic actuator to open and close selected ones of the gaps.
Claims20
A device comprising:
- a cascaded electrostatic actuator defining a stack in a substrate having a plurality of gaps between parallel plate electrodes;
- and
- a controller configured to drive the cascaded electrostatic actuator to open and close selected ones of the gaps.
A method of controlling a cascaded actuator, comprising:
- storing a plurality of first values corresponding to a plurality of gaps formed by a stack of parallel plates within a substrate;
- and
- driving a selected first one of the gaps with a voltage equaling the first value corresponding to the first one of the gaps to close the first one of the gaps.
A method of controlling a cascaded actuator having a plurality of gaps formed by a stack of parallel plates within a substrate, the method comprising:
- driving the cascaded actuator with successive pulses of a first voltage to successively close the gaps.
Dependencies are inferred from the claim text.