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US 2013/0076273 A1Published application
Row and column actuator control
AssigneeDigitalOptics Corporation MEMS
InventorRoman C. Gutierrez
Life of this patent
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Abstract
In one embodiment, a device is provided that includes: a plurality of actuators arranged into a plurality of rows and a plurality of columns; a plurality of row conductors corresponding to the plurality of rows; a plurality of column conductors corresponding to the plurality of columns; and a controller configured to select at least one of the actuators in a row by raising a voltage on the corresponding row conductor to couple each selected actuator to its corresponding column conductor.
Claims20
A device comprising:
- a cascaded electrostatic actuator defining a stack in a substrate having a plurality of isolated plates, each isolated plate being substantially surrounded by a corresponding gap between the isolated plate and the substrate;
- and
- a controller configured to drive the cascaded electrostatic actuator to open and close selected ones of the gaps.
A method, comprising:
- selecting at least one electrostatic actuator for actuation from a plurality of electrostatic actuators, the electrostatic actuators being arranged in rows and columns corresponding to a plurality of row and column conductors, and
- driving the selected actuator by raising the voltage on the corresponding row conductor to couple the selected actuator to the corresponding column conductor.
A device comprising:
- a plurality of actuators arranged into a plurality of rows and a plurality of columns;
- a plurality of row conductors corresponding to the plurality of rows;
- a plurality of column conductors corresponding to the plurality of columns;
- and
- a controller configured to select at least one of the actuators in a row by raising a voltage on the corresponding row conductor to couple each selected actuator to its corresponding column conductor.
2 more elements
Dependencies are inferred from the claim text.