Micro-electromechanical generator and electric apparatus using same

A micro-electro-mechanical power generator comprising:

• a first substrate having a first substrate surface;
• a second substrate having a second substrate surface;
• a movable substrate which can move;
• and
• fixation structures for supporting the movable substrate;
• wherein the first substrate surface and the second substrate surface are opposed to each other;
• wherein the movable substrate is disposed between the first substrate and the second substrate and can move at least in one axis direction that is in parallel with the first substrate surface (hereinafter, the direction is also referred to as a “moving direction of the movable substrate”);
• wherein a plurality of first electrets are disposed on one surface of the first substrate surface and a surface of the movable substrate facing to the first substrate surface and a plurality of first electrodes are disposed on the other surface;
• wherein a plurality of second electrets are disposed on one surface of the second substrate surface and the surface of the movable substrate facing to the second substrate surface and a plurality of second electrodes are disposed on the other surface;
• wherein the first electrets, the first electrodes, the second electrets, and the second electrodes line up in a direction in parallel with the moving direction of the movable substrate;
• wherein the first electrets are disposed such that they are parallel with each other and distances between centers of two adjacent first electrets are equal to each other;
• wherein the first electrodes are disposed such that they are parallel with each other and distances between centers of two adjacent first electrodes are equal to each other;
• wherein the second electrets are disposed such that they are parallel with each other and distances between centers of two adjacent second electrets are equal to each other;
• wherein the second electrodes are disposed such that they are parallel with each other and distances between centers of two adjacent electrodes are equal to each other;
• wherein the distances between centers of the two adjacent first electrets, the distances between centers of the two adjacent first electrodes, the distances between centers of the two adjacent second electrets, and the distances between centers of the two adjacent second electrodes are equal to each other;
• wherein the first electrets, the first electrodes, the second electrets and the second electrodes are disposed such that when positions of the first electrets align with positions of the first electrodes when viewed in a direction vertical to the first substrate surface, positions of the second electrets are shifted from positions of the second electrodes by about a half the distance between centers of the two adjacent first electrodes in the moving direction of the movable substrate;
• and
• wherein the first electrets, the first electrodes, the second electrets and the second electrodes are disposed such that when an overlapped area between the first electrodes and the first electrets is largest, the second electrodes and the second electrets do not overlap when viewed in a direction vertical to the first substrate surface.