Method for protection of a layer of a vertical stack and corresponding device

A method comprising:

• removing part of a vertical stack comprising at least one intermediate layer between a lower region and an upper region to open up for the vertical stack at least one free lateral face on which the lower region, the upper region, and the at least one intermediate layer are exposed;
• forming a cavity within the at least one intermediate layer with respect to the at least one free lateral face;
• depositing protection material on the at least one free lateral face and in the cavity;
• and
• removing the protection material on the at least one free lateral face while the protection material in the cavity remains.

A device comprising:

• a vertical stack comprising a lower region, an upper region, and at least one intermediate layer between said lower and upper regions;
• said vertical stack comprising at least one free lateral face on which said lower and upper regions are exposed;
• and
• said vertical stack comprising a protection material in a cavity adjacent said at least one intermediate layer, with said protection material extending to the at least one free lateral face for exposure.

A device comprising:

• a vertical stack comprising
• a lower region,
• an upper region,
• a plurality of intermediate layers between said lower and upper regions,
• at least one separating region separating said plurality of intermediate layers,
• said lower and upper regions and said at least one separating region extending to at least one free lateral face for exposure, and
• protection material adjacent each intermediate layer so that each protection material is also extended to the at least one free lateral face for exposure.