Stacked Die Package for MEMS Resonator System

A packaging structure for an electromechanical resonator system, the packaging structure comprising:

• a control chip for a microelectromechanical resonator;
• an electromechanical resonator chip that (i) includes the microelectromechanical resonator and (ii) is mounted on the control chip in a stacked die configuration;
• a first electrically conductive bump to electrically couple the control chip to the electromechanical resonator chip;
• a lead frame including at least one electrical lead having a mounting surface and an electrical contact surface, wherein the stacked die configuration is mounted on and physically coupled to the mounting surface of the electrical lead;
• and
• a mold compound, enclosing at least a portion of the lead frame and stacked die configuration of the control chip and the electromechanical resonator chip, wherein (i) the mounting surface of the electrical lead and the portion of the stacked die configuration which is mounted thereon are enclosed in the mold compound, and (ii) the electrical contact surface of the electrical lead is externally exposed;
• and
• wherein the first electrically conductive bump is disposed (a) between the control chip and electromechanical resonator chip and (b) within the mold compound.