Three-dimensional boron particle loaded thermal neutron detector

A method, comprising:

• providing a charge sensitive platform including a structure including a p+ region on a first side of an intrinsic region, an n+ region on a second side of said intrinsic region and extending portions formed of one of said p+ region or said n+ region and a portion of said intrinsic layer, wherein said extending portions have space between each extending portion of said extending portions, wherein said extending portions have a pitch within a range from about 0.1 μm to about 10 μm and a height within a range from about 10 μm to about 200 μm;
• and
• filling said space with particles of neutron sensitive material NSM), wherein all of said particles have diameter consisting essentially of 10−6 m or less.