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US 2013/0075700 A1Published application
Electrode Structure Including Graphene And Field Effect Transistor Having The Same
AssigneeSamsung Electronics Co., Ltd.
InventorsHee-jun Yang, Seong-jun Park, Hyun-jong Chung, Jin-seong Heo
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Abstract
According to example embodiments, an electrode structure includes a graphene layer on a semiconductor layer and an electrode containing metal on the graphene layer. A field effect transistor (FET) may include the electrode structure.
Claims20
An electrode structure comprising:
- a graphene layer on a semiconductor layer;
- and
- an electrode containing metal on the graphene layer,
- the graphene layer contacting at least one of the semiconductor layer and the electrode containing metal.
1 more element
A field effect transistor (FET) comprising:
- a semiconductor substrate doped with a first impurity,
- the semiconductor substrate including a source region and a drain region doped with a second impurity,
- the second impurity having an opposite polarity to a polarity of the first impurity;
- a first graphene layer and a second graphene layer on the semiconductor substrate and spaced apart from each other,
- the first graphene layer on the source region and the second graphene layer on the drain region of the substrate;
- a source electrode containing metal and a drain electrode containing metal that are respectively on the first graphene layer and the second graphene layer,
- the first graphene layer contacting at least one of the substrate and the source electrode,
- the second graphene layer contacting at least one of the substrate and the drain electrode;
- a gate insulating layer between the source electrode and the drain electrode on the semiconductor layer;
- and
- a gate electrode on the gate insulating layer.
8 more elements
A contact comprising:
- a graphene layer sandwiched between an electrode containing metal and a doped-semiconductor structure,
- the graphene layer being configured to change a Schottky energy barrier between the electrode containing metal and the doped-semiconductor structure.
Dependencies are inferred from the claim text.