Target supply unit and extreme ultraviolet light generation apparatus
AssigneeGigaphoton Inc.
InventorsTakayuki YABU, Yoshifumi UENO, Junichi FUJIMOTO, Yukio WATANABE, Toshihiro NISHISAKA
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Abstract
A target supply unit includes a nozzle through which a target material is outputted, and a first electrically conductive member having a first opening formed therein and positioned to face the nozzle in a direction into which the target material is outputted through the nozzle. The first electrically conductive member is positioned so that the first opening is located below the nozzle in a gravitational direction. The target supply unit includes a voltage generator which applies a voltage between the target material and the first electrically conductive member.
Claims5
A target supply unit, comprising:
- a nozzle through which a target material is outputted;
- a first electrically conductive member having a first opening formed therein and positioned to face the nozzle in a direction into which the target material is outputted through the nozzle, the first electrically conductive member being positioned so that the first opening is located below the nozzle in a gravitational direction;
- and
- a voltage generator configured to apply a voltage between the target material and the first electrically conductive member.
Dependencies are inferred from the claim text.