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US 2013/0075606 A1Published application
Composite charged particle beam apparatus
AssigneeHitachi High-Tech Science Corporation
InventorsAtsushi UEMOTO, Yo YAMAMOTO, Tatsuya ASAHATA
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Abstract
Provided is a composite charged particle beam apparatus, including: a focused ion beam column (4); an electron beam column (6) orthogonal to the focused ion beam column (4); a sample stage (2) for moving a sample (11); an optical microscope (14) for observing the sample (11); a display portion (12, 13) capable of displaying a focused ion beam image, an electron beam image, and an optical microscope image, and a stage control portion (3) for moving the sample stage (2) in accordance with a coordinate system of each image.
Claims6
A composite charged particle beam apparatus, comprising:
- a focused ion beam column;
- an electron beam column, which is arranged substantially at a right angle with respect to the focused ion beam column;
- a sample stage for moving a sample;
- a detector for detecting a secondary particle generated from the sample;
- an observation image formation portion for forming a focused ion beam image and an electron beam image based on a detection signal of the detector;
- an optical microscope for observing the sample;
- a display portion capable of displaying the focused ion beam image, the electron beam image, and an optical microscope image;
- and
- a stage control portion for moving the sample stage in accordance with coordinate systems of the focused ion beam image, the electron beam image, and the optical microscope image.
6 more elements
Dependencies are inferred from the claim text.