Particle beam system having a hollow light guide
AssigneeCarl Zeiss Microscopy GmbH
InventorsStewart Bean, Mike Astley
Life of this patent
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Abstract
A system includes a particle optical system and a photosensitive detector. The particle optical system includes a charged particle beam source and an objective lens. The charged particle beam source is configured to generate a charged particle beam that travels along a particle beam path, and the objective lens is configured to focus the particle beam onto an object plane of the particle optical system. The system is configured such that a light beam path of the system extends from the object plane to the photosensitive detector.
Claims20
A system having a particle beam path, a light beam path and an object plane, the system comprising:
- a particle optical system, comprising:
- a charged particle beam source configured to generate a charged particle beam that travels along the particle beam path;
- and
- an objective lens configured to focus the charged particle beam onto the object plane;
- and
- a hollow light guide comprising a channel having an interior surface comprising a light reflecting mirror surface;
- and
- a photosensitive detector,
- wherein:
- the light beam path extends from the object plane to the photosensitive detector;
- during use of the system, the charged particle beam is incident on the object plane after having passed the channel;
- and
- during use of the system, light rays of the light beam path are guided through the channel by one or more reflections at the mirror surface.
A system having a particle beam path and a light beam path, the system comprising:
- a particle optical system comprising:
- a charged particle beam source configured to generate a charged particle beam traveling along the particle beam path;
- and
- an objective lens, which is configured to focus the charged particle beam onto an object plane of the particle optical system;
- and
- a photosensitive detector,
- wherein the light beam path extends from the object plane to the photosensitive detector.
Dependencies are inferred from the claim text.