Optical filter device, optical module, and electronic apparatus

An optical filter device comprising:

• an interference filter having:
• a first reflecting film adapted to partially reflect and partially transmit light impinging on the first reflecting film, and
• a second reflecting film opposed to the first reflecting film across a gap, the second reflecting film being adapted to partially reflect and partially transmit light impinging on the second reflecting film;
• and
• a housing holding the interference filter,
• wherein a light passage hole is provided in a part of the housing opposed to the first reflecting film and the second reflecting film,
• the housing has a light transmissive substrate covering the light passage hole, and
• an edge of the light transmissive substrate overlaps a portion of the housing in a plan view of the light transmissive substrate, and the light transmissive substrate is bonded to the housing in a continuous area between an edge of the light passage hole and the edge of the light transmissive substrate, the continuous area surrounding the light passage hole.

An optical filter device comprising:

• an interference filter having:
• a first substrate,
• a second substrate opposed to the first substrate,
• a first reflecting film disposed on the first substrate and adapted to partially reflect and partially transmit light impinging on the first reflecting film, and
• a second reflecting film disposed on the second substrate, the second reflecting film being opposed to the first reflecting film across a gap and being adapted to partially reflect and partially transmit light impinging on the second reflecting film;
• and
• a housing holding the interference filter,
• wherein the housing has:
• a base member having a first light passage hole in an area opposed to the first reflecting film, and
• a lid bonded to the base member, the lid having a second light passage hole in an area opposed to the second reflecting film,
• the base member has a first light transmissive substrate covering the first light passage hole,
• an edge of the first light transmissive substrate partially overlaps the base member in a plan view of the first light transmissive substrate, the first light transmissive substrate is bonded to the base member in a continuous area between an edge of the first light passage hole and the edge of the first light transmissive substrate, the continuous area surrounding the first light passage hole,
• the lid has a second light transmissive substrate covering the second light passage hole, and
• an edge of the second light transmissive substrate partially overlaps the lid in the plan view, and the second light transmissive substrate is bonded to the lid in a continuous area between an edge of the second light passage hole and the edge of the second light transmissive substrate, the continuous area surrounding the second light passage hole.

An optical filter device comprising:

• an interference filter having:
• a first substrate,
• a second substrate opposed to the first substrate,
• a first reflecting film disposed on the first substrate and adapted to partially reflect and partially transmit light impinging on the first reflecting film, and
• a second reflecting film disposed on the second substrate, the second reflecting film being opposed to the first reflecting film across a gap and being adapted to partially reflect and partially transmit light impinging on the second reflecting film;
• and
• a housing holding the interference filter,
• wherein the housing has a base member having a light passage hole in an area opposed to the first reflecting film, and a lid bonded to the base member,
• the base member has a light transmissive substrate covering the light passage hole, and
• an edge of the light transmissive substrate partially overlaps the base member in a plan view of the light transmissive substrate, the light transmissive substrate is bonded to the base member in a continuous area between an edge of the light passage hole and the edge of the light transmissive substrate, the continuous area surrounding the light passage hole.

An optical filter device comprising:

• an interference filter having:
• a first substrate,
• a second substrate opposed to the first substrate,
• a first reflecting film disposed above the first substrate and adapted to partially reflect and partially transmit light impinging on the first reflecting film, and
• a second reflecting film disposed on the second substrate, the second reflecting film being opposed to the first reflecting film across a gap and being adapted to partially reflect and partially transmit light impinging on the second reflecting film;
• and
• a housing holding the interference filter,
• wherein the housing has a base member, a lid bonded to the base member, and a light passage hole in an area opposed to the second reflecting film,
• the lid has a light transmissive substrate covering the second light passage hole, and
• an edge of the light transmissive substrate partially overlaps the lid in a plan view of the light transmissive substrate, the light transmissive substrate is bonded to the lid in a continuous area between an edge of the light passage hole and the edge of the light transmissive substrate, the continuous area surrounding the light passage hole.

An optical filter device comprising:

• an interference filter having:
• a first substrate,
• a second substrate opposed to the first substrate,
• a first reflecting film on the first substrate, and
• a second reflecting film on the second substrate and facing the first reflecting film across a gap;
• a housing containing the interference filter, the housing including a light passage hole aligned with the first and second reflecting films;
• and
• a light transmissive substrate hermetically bonded to an exterior surface of the housing so as to completely overlap the light passage hole.