Reflow pretreatment apparatus and reflow pretreatment method
AssigneeRenesas Electronics Corporation
InventorYuji SHIMIZU
Life of this patent
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Abstract
This invention is to prevent tin from being adhered to a surface of part of an object to be soldered, a solder bump being formed in the part thereof. A reflow pretreatment apparatus includes a hydrogen radical generator and a filter for capturing suspended solids. The hydrogen radical generator radiates hydrogen radicals onto solder arranged in an object to be soldered. The filter for capturing suspended solids is arranged such that the hydrogen radicals are radiated onto the solder after passing through the filter for capturing suspended solids.
Claims12
A method of manufacturing a semiconductor device, comprising the steps of:
- arranging both an object to be soldered in which solder including tin has been arranged and a filter for capturing suspended solids at predetermined positions;
- and
- irradiating the solder arranged in the object to be soldered with hydrogen radicals, while the object to be soldered and the filter for capturing suspended solids are being arranged at the predetermined positions,
- wherein the hydrogen radicals are radiated onto the solder after passing through the filter for capturing suspended solids, while the object to be soldered and the filter for capturing suspended solids are being arranged at the predetermined positions.
The method of manufacturing a semiconductor device according to
- a plurality of solder bumps by melting and solidifying the solder which has been irradiated with hydrogen radicals.
A reflow pretreatment apparatus, comprising:
- a hydrogen radical generator for radiating hydrogen radicals onto solder arranged in an object to be soldered;
- and
- a filter for capturing suspended solids,
- wherein the filter for capturing suspended solids is arranged such that the hydrogen radicals are radiated onto the solder after passing through the filter for capturing suspended solids.
Dependencies are inferred from the claim text.