Microwave processing apparatus and method for processing object to be processed
AssigneeTokyo Electron Limited
InventorMitsutoshi ASHIDA
Life of this patent
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Abstract
A microwave processing apparatus includes a processing chamber which accommodates an object; a microwave introducing unit for generating microwaves used to process the object and introducing the microwaves into the processing chamber; and a control unit for controlling the microwave introducing unit. The microwave introducing unit includes microwave sources to generate the microwaves and introduces parts of the microwaves into the processing chamber simultaneously, and the control unit controls the microwave sources such that arbitrary combinations of the microwave sources alternately repeat a simultaneous microwave generating state and a microwave non-generating state during a state of processing the object.
Claims14
A microwave processing apparatus, comprising:
- a processing chamber which accommodates an object to be processed;
- a microwave introducing unit for generating microwaves used to process the object and introducing the microwaves into the processing chamber;
- and
- a control unit for controlling the microwave introducing unit,
- wherein the microwave introducing unit includes a plurality of microwave sources to generate the microwaves and is configured to introduce parts of the microwaves into the processing chamber simultaneously, and
- wherein the control unit controls the plurality of microwave sources such that, during a state of processing the object, each of arbitrary combinations of the plurality of microwave sources alternately repeats a state where the microwaves are generated simultaneously and a state where no microwave is generated.
A method for processing an object to be processed by using a microwave processing apparatus including a processing chamber which accommodates the object and a microwave introducing unit which generates microwaves used to process the object and introduces the microwaves into the processing chamber, wherein the microwave introducing unit includes a plurality of microwave sources to generate the microwaves and is configured to introduce parts of the microwaves into the processing chamber simultaneously,
- the method comprising controlling the plurality of microwave sources such that, during a state of processing the object, each of arbitrary combinations of the plurality of microwave sources alternately repeats a state where the microwaves are generated simultaneously and a state where no microwave is generated.
Dependencies are inferred from the claim text.