Method for building a substrate holder
AssigneeCommissariat A L'energie Atomique Et Aux Energies Alternatives
InventorsFrank Fournel, Laurent Bally, Marc Zussy, Dominique Jourde
Life of this patent
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Abstract
A method for making a support of at least one substrate, including: making a stack including at least two substrates, each of the two substrates including two opposite main faces, both substrates being secured to each other such that one of the main faces of a first of the two substrates is positioned facing one of the main faces of the second of the two substrates and against an etch-stop material; etching, through the first of the two substrates and with stop on the etch-stop material, at least one location that can receive a substrate that can be supported by the support.
Claims19
1-18. (canceled)
A method for making a support of at least one substrate, comprising:
- making a stack including at least two substrates, each of the two substrates including two opposite main faces, both substrates being secured to each other such that one of main faces of a first of the two substrates is positioned facing one of main faces of the second of the two substrates and against an etch-stop material;
- etching, through the first of the two substrates and with stop on the etch-stop material, at least one location that can receive the substrate that can be supported by the support.
Dependencies are inferred from the claim text.