Mems electrochemical gas sensor
AssigneeElectronics and Telecommunications Research Institute
InventorsSeung Eon Moon, Nak Jin Choi, Hyung Kun Lee, Jae Woo Lee, Woo Seok Yang, Jong Dae Kim
Life of this patent
Estimating the term…
Abstract
Disclosed is an electrochemical gas sensor using micro electro mechanical systems (MEMS). The MEMS electrochemical gas sensor includes: a substrate a lower central region of which is etched by a predetermined thickness; a first insulation film formed on the substrate; a heat emitting resistance body formed on the first insulation film; a second insulation film formed on the heat emitting resistance body; a reference electrode formed in an upper central region of the second insulation film; a solid electrolyte formed on the reference electrode; and a detection electrode formed on the solid electrolyte.
Claims11
A MEMS electrochemical gas sensor, comprising:
- a substrate a lower central region of which is etched by a predetermined thickness;
- a first insulation film formed on the substrate;
- a heat emitting resistance body formed on the first insulation film;
- a second insulation film formed on the heat emitting resistance body;
- a reference electrode formed in an upper central region of the second insulation film;
- a solid electrolyte formed on the reference electrode;
- and
- a detection electrode formed on the solid electrolyte.
A MEMS electrochemical gas sensor, comprising:
- a substrate a lower central region of which is etched by a predetermined thickness;
- a first insulation film formed on the substrate;
- a heat emitting resistance body formed on the first insulation film;
- a second insulation film formed on the heat emitting resistance body;
- a solid electrolyte formed in an upper central region of the second insulation film;
- a reference electrode formed at one side of an upper portion of the solid electrolyte;
- and
- a detection electrode formed at an opposite side of the upper portion of the solid electrolyte.
Dependencies are inferred from the claim text.