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US 2013/0075237 A1Published application
Mems actuator/sensor
AssigneeDigitalOptics Corporation MEMS
InventorRoman C. Gutierrez
Life of this patent
Estimating the term…
Abstract
A device can have an electrostatic MEMS actuator and a capacitive sensor in electrical communication with the electrostatic MEMS actuator. The capacitive sensor can be configured to determine a capacitance of the electrostatic MEMS actuator while a force is being applied to the electrostatic MEMS actuator as the electrostatic MEMS actuator is being actuated. The device can be used to construct a keyboard having tactile feedback, for example.
Claims32
A device comprising:
- an electrostatic MEMS actuator;
- a force effector configured to facilitate the application of an external force to the electrostatic MEMS actuator;
- and
- a capacitive sensor in electrical communication with the electrostatic MEMS actuator and configured to determine a capacitance of the electrostatic MEMS actuator when an external force is applied to the electrostatic MEMS actuator while the electrostatic MEMS actuator is being actuated.
1 more element
A switch comprising:
- a manual control;
- and
- an electrostatic MEMS actuator responsive to the manual control.
A keyboard comprising:
- a key;
- an electrostatic MEMS actuator configured to move in response to movement of the key;
- and
- a capacitive sensor in electrical communication with the electrostatic MEMS actuator and configured to determine a capacitance of the electrostatic MEMS actuator.
1 more element
A method comprising:
- actuating an electrostatic MEMS actuator;
- applying an external force to the electrostatic MEMS actuator;
- sensing a capacitance of the electrostatic MEMS actuator while the force is being applied;
- and
- reacting to a change in the sensed capacitance of the electrostatic MEMS actuator.
2 more elements
A device comprising:
- an electrostatic MEMS actuator;
- a capacitive sensor in electrical communication with the electrostatic MEMS actuator and configured to determine a capacitance of the electrostatic MEMS actuator;
- and
- wherein the electrostatic MEMS actuator is configured to be touched by a person to cause a change in the capacitance thereof.
1 more element
Dependencies are inferred from the claim text.