Thin film forming apparatus

A thin film forming apparatus comprising a substrate holding mechanism holding a plurality of substrates to form a thin film on each of the plurality of substrates,

• the substrate holding mechanism including:
• a substrate holding member which holds the plurality of substrates,
• a support member which supports the substrate holding member, and
• a rotation member which rotates the support member, and
• the substrate holding member including:
• a plurality of holding surfaces which holds the plurality of substrates and is disposed between a film forming source emitting a material of the thin film and the plurality of substrates,
• a plurality of step portions which is formed between the plurality of holding surfaces, and
• a plurality of opening portions each of which is formed in each of the plurality of holding surfaces,
• wherein when ends of the plurality of substrates respectively come into contact with the step portions in a state where a part of a non-film forming portion on which a thin film is not to be formed in each of the plurality of substrates overlaps an other substrate and a film forming portion on which a thin film is to be formed is exposed, the plurality of substrates is loaded in a manner that the film forming portion is exposed to the film forming source through the opening portion.