Manufacturing method and manufacturing apparatus of a group iii nitride crystal
AssigneeRicoh Company, Ltd.
InventorsHirokazu Iwata, Seiji Sarayama, Minoru Fukuda, Tetsuya Takahashi, Akira Takahashi
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AssigneeRicoh Company, Ltd.
InventorsHirokazu Iwata, Seiji Sarayama, Minoru Fukuda, Tetsuya Takahashi, Akira Takahashi
Estimating the term…
A method for manufacturing a group III nitride crystal on a seed crystal in a holding vessel holding therein a melt containing a group III metal, an alkali metal and nitrogen. The manufacturing method comprises the steps of causing the seed crystal to make a contact with the melt, setting an environment of the seed crystal to a first state offset from a crystal growth condition while in a state in which said seed crystal is in contact with the melt, increasing a nitrogen concentration in the melt, and setting the environment of the seed crystal to a second state suitable for crystal growth when the nitrogen concentration of the melt has reached a concentration suitable for growing the seed crystal.
1-17. (canceled)
A method for manufacturing a group III nitride crystal in a holding vessel holding a melt containing a group III metal, an alkali metal and nitrogen, comprising the steps of:
A manufacturing apparatus of a group III nitride crystal, comprising:
26-28. (canceled)
Dependencies are inferred from the claim text.