Inertial sensor

An inertial sensor comprising:

• a sensor part including a driving body, a flexible substrate part displaceably supporting the driving body, a support part supporting the flexible substrate part so that the driving body is freely movable in a state in which it is floated, and a lower cap covering a lower portion of the driving body and coupled to the support part;
• an application specific integrated circuit (ASIC) including the sensor part stacked thereon and coupled thereto;
• a printed circuit board including the ASIC stacked thereon and coupled thereto and electrically connected to the sensor part and the ASIC by a wire;
• and
• a cap covering the sensor part and the ASIC and coupled to the printed circuit board,
• wherein the printed circuit board includes an air discharging hole formed in order to discharge internal air of the cap to the outside.

An inertial sensor comprising:

• a sensor part including a driving body, a flexible substrate part displaceably supporting the driving body, a support part supporting the flexible substrate part so that the driving body is freely movable in a state in which it is floated, and a lower cap covering a lower portion of the driving body and coupled to the support part;
• an application specific integrated circuit (ASIC) including the sensor part stacked thereon and coupled thereto;
• a printed circuit board including the ASIC stacked thereon and coupled thereto and electrically connected to the sensor part and the ASIC by a wire;
• and
• a cap covering the sensor part and the ASIC and coupled to the printed circuit board,
• wherein the lower cap includes a bonding part and a space part formed thereon, the bonding part being applied with a bonding agent in order to couple the lower cap and the support body to each other and the space part not being applied therewith, and internal air of the sensor part is discharged to the outside by the space part.