Sensor element, manufacturing method of sensor element, sensor device, and electronic apparatus
AssigneeSeiko Epson Corporation
InventorFumio ICHIKAWA
Life of this patent
Estimating the term…
Abstract
A sensor element has drive vibrating arms drive-vibrating by energization, adjustment vibrating arms vibrating with the drive vibrations of the drive vibrating arms, detection electrodes outputting charge in response to physical quantities applied to the drive vibrating arms, first electrodes provided on the adjustment vibrating arms, electrically connected to the detection electrodes, and outputting charge with the vibrations of the adjustment vibrating arms, and a pair of second electrodes provided on the adjustment vibrating arms, electrically connected to a pair of detection electrodes, and outputting charge having an opposite polarity to that of the first electrodes with the vibrations of the adjustment vibrating arms.
Claims19
A sensor element comprising:
- a base part;
- a drive vibrating arm extended from the base part and drive-vibrating;
- a vibrating arm extended from the base part and vibrating with the drive vibration of the drive vibrating arm;
- a detection part containing a detection electrode that outputs a signal in response to a physical quantity applied to the drive vibrating arm;
- a first electrode provided on the vibrating arm, electrically connected to the detection electrode, and generating charge with the vibration of the vibrating arm;
- and
- a second electrode provided on the vibrating arm, electrically connected to the detection electrode, and generating charge having an opposite polarity to that of the charge generated from the first electrode with the vibration of the vibrating arm.
A manufacturing method of a sensor element, the sensor element including
- a base part,
- a drive vibrating arm extended from the base part and drive-vibrating,
- a vibrating arm extended from the base part and vibrating with the drive vibration of the drive vibrating arm,
- a detection part containing a detection electrode that outputs a signal in response to a physical quantity applied to the drive vibrating arm,
- a first electrode provided on the vibrating arm, electrically connected to the detection electrode, and generating charge with the vibration of the vibrating arm, and
- a second electrode provided on the vibrating arm, electrically connected to the detection electrode, and generating charge having an opposite polarity to that of the charge generated from the first electrode with the vibration of the vibrating arm,
- the method comprising adjusting an amount of charge generated in the first electrode or the second electrode by removing part or all of the first electrode or the second electrode.
Dependencies are inferred from the claim text.