Apparatus and method for drying substrates
AssigneeSemes Co., Ltd.
InventorsYoung-Ju JEONG, Bok-Kyu LEE, Sun-Kyu HWANG, Jeong-Yong BAE, Soo-Bin YONG
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Abstract
A method for drying substrates using isopropyl alcohol (IPA) includes: a pre-stage in which heated fluid is injected to a bottom surface of a substrate to raise a temperature of the substrate simultaneously to injection of an organic solvent to a top surface of the substrate and injection of a dry gas to the top surface thereof to improve a vaporization power of the organic solvent; and a final stage in which the injection of the heated fluid is stopped and the organic solvent and the dry gas are injected to the top surface of the substrate.
Claims10
A method for drying substrates, comprising:
- a pre-stage in which heated fluid is injected to a bottom surface of a substrate to raise a temperature of the substrate simultaneously to injection of an organic solvent to a top surface of a rotating substrate.
A method for drying substrates, comprising:
- a pre-stage in which heated fluid is injected to a bottom surface of a substrate to raise a temperature of the substrate simultaneously to injection of an organic solvent to a top surface of the substrate and injection of a dry gas to the top surface thereof to improve a vaporization power of the organic solvent;
- and
- a final stage in which the injection of the heated fluid is stopped and the organic solvent and the dry gas are injected to the top surface of the substrate.
Dependencies are inferred from the claim text.