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US 2013/0074281 A1Published application
Particle collecting apparatus and particle collecting method
AssigneeTokyo Electron Limited
InventorsNobuhiro TAKAHASHI, Keiko HADA
Life of this patent
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Abstract
A particle collecting apparatus is provided with a case, an ultrasonic generator, a gas supplying unit, a suction unit and a seal member. The case has one end, and defines a space at the one end. The ultrasonic generator is provided in the case, and generates ultrasonic waves towards the opening defined by the one end of the case. The gas supplying unit supplies gas to the space. The suction unit exhausts the space. The seal member has elasticity, and is provided at the one end so as to surround the opening.
Claims8
A particle collecting apparatus comprising:
- a case having one end configured to define a space that is opened at the one end;
- an ultrasonic generator configured to generate ultrasonic waves towards an opening defined by the one end of the case;
- a gas supplying unit configured to supply gas to the space;
- a suction unit configured to exhaust the space;
- and
- a seal member having elasticity provided at the one end so as to surround the opening.
3 more elements
A particle collecting method comprising:
- providing a seal member at one end of a case so as to surround an opening defined by the one end;
- bringing the seal member into contact with a target object, thereby defining a closed space between the target object and the case;
- irradiating ultrasonic waves to the target object;
- supplying gas into the space;
- and
- exhausting the space.
3 more elements
Dependencies are inferred from the claim text.